真空节能阀 Energy Valve - 大连恒昇机械有限公司

工作原理How It Works

在半导体及 LED、OLED、LCD、SOLAR 产业中，真空干泵（Vacuum Dry Pump）长期连续运转，即使腔体处于待机状态也在满负荷抽气，电耗与磨损巨大。 In semiconductor and LED / OLED / LCD / solar fabs, vacuum dry pumps run continuously — even when the chamber is idle they pump at full load, wasting energy and accelerating wear.

节能阀安装于干泵进气端，使泵在运转时不受大气压负载，从源头降低电耗、降低泵体运行温度，同时防止泵瞬间停机或断电时的颗粒倒流（Back-stream），保护腔体洁净度。 Installed at the pump inlet, the energy valve relieves the pump from atmospheric load during operation — cutting power draw and running temperature at the source, while preventing particle back-stream into the chamber on sudden pump stop or power loss.

SemiconductorLEDOLEDLCDSOLAR

节能与保护效果Savings & Protection

0%Load Lock 泵最高节电Max power saving (load-lock pump)

0%Process 泵最高节电Max power saving (process pump)

0%+泵寿命延长Pump lifetime extension

0%冷却水（PCW）节约Cooling water (PCW) saving

降低运行温度Lower Running Temperature

实测 MB 温度 78.9°C → 57.2°C，DP Body 130.7°C → 78.2°C。轴承温度在 70°C 以上时每降低 15°C 寿命约延长一倍。Measured: MB 78.9°C → 57.2°C, DP body 130.7°C → 78.2°C. Above 70°C, every 15°C reduction roughly doubles bearing life.

防止颗粒倒流Back-stream Prevention

泵瞬间停机或断电时自动阻断，防止颗粒倒流污染腔体与管路。Automatically isolates on sudden pump stop or power-off, preventing particles from flowing back into chamber and lines.

减少碳排放CO₂ Reduction

降低电耗与冷却水消耗，直接减少企业 CO₂ 排放，助力绿色工厂指标。Lower power and cooling-water consumption directly cuts CO₂ emissions — supporting green-fab targets.

龙头企业验证Validated by Industry Leader

已通过面板行业龙头企业 BOE（京东方）验证。Validated by BOE, the leading display manufacturer.

适配泵型号、接口规格与投资回收测算，请提供在用干泵型号与运行工况，我们将出具针对性方案。 For pump compatibility, interface specs and ROI calculation, send us your dry-pump model and operating conditions — we will prepare a tailored proposal.