产品中心 - 大连恒昇机械有限公司

半导体旋转导通器（Rotary Union）Semiconductor Rotary Unions

在旋转部件与固定部件之间传输冷却液、气体、真空等流体，保持密封性、稳定性及洁净度，应用于 PVD / CVD / CMP / IMP / ALD 核心工艺设备Transferring coolant, gas and vacuum between rotating and stationary parts with sealing, stability and cleanliness — used in PVD / CVD / CMP / IMP / ALD process tools

国产化机遇与恒昇战略Localization Opportunity & Our Strategy

国内尚未形成有规模的半导体旋转导通器核心供应商，国产设备替代成为主流趋势China still lacks a large-scale core supplier of semiconductor rotary unions; localization is the mainstream trend
2021 年布局半导体，定向开发半导体核心配件导通器Entered the semiconductor field in 2021 with targeted rotary-union development
已完成 PVD / CMP / WET / IMP 多款进口导通器再制造及国产化替代Completed remanufacturing and localization of multiple imported PVD / CMP / WET / IMP rotary unions
已供货 300mm PVD/CMP 设备导通器，稳定供应中芯国际、长鑫存储等头部晶圆厂Supplying 300mm PVD/CMP rotary unions to leading fabs including SMIC and CXMT

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Rotary union design — 自主设计开发In-house design

工艺Process	参考料号Reference P/N	状态Status
PVD	0190-33463 / 0190-40352 / 0010-46093	再制造 + 国产化替代，稳定供货Remanufactured + localized, in stable supply
CMP	2328877-04 / E12103160	再制造 + 国产化替代，稳定供货Remanufactured + localized, in stable supply
IMP / WET	多款型号Multiple models	已完成开发验证Developed and validated

真空节能阀（Energy Valve）Vacuum Energy-Saving Valve

安装于半导体及 LED / OLED / LCD / SOLAR 产业真空干泵，最高节电 70%，已通过面板龙头 BOE 验证Installed on vacuum dry pumps in semiconductor and LED / OLED / LCD / solar fabs — up to 70% power saving, validated by BOE

Load Lock Chamber Pump 电力减少 60~70%；Process Chamber Pump 电力减少 30~35%60–70% power reduction on load-lock chamber pumps; 30–35% on process chamber pumps
泵寿命增加 50% 以上：降低转子负载与运行温度（MB 78.9°C→57.2°C，DP Body 130.7°C→78.2°C）Pump lifetime +50%: lower rotor load and running temperature (MB 78.9°C→57.2°C, DP body 130.7°C→78.2°C)
冷却水（PCW）节约 50%50% saving on pump cooling water (PCW)
防止 Back-stream：避免泵瞬间停机或断电导致的颗粒倒流Back-stream prevention: avoids particle backflow on sudden pump stop or power-off
减少企业 CO₂ 排放，绿色工厂改造优选部件Cuts CO₂ emissions — a preferred component for green-fab retrofits

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CMP / CVD 其它核心零配件Other CMP / CVD Core Parts

300mm CMP AMAT 设备关键配件再制造与国产化替代；CVD Heater Block 国产化配套生产Remanufacturing and localization of key parts for 300mm AMAT CMP tools; localized CVD heater blocks

Pad Conditioner DDF3

料号 0010-28527，CMP Reflexion 关键配件替代P/N 0010-28527, CMP Reflexion key part replacement

Gear Assy / Sealed Bearings

料号 0010-19312、0010-33061 等P/N 0010-19312, 0010-33061, etc.

Brush Wafer Roller Assy

料号 0010-25973 / 0010-25969P/N 0010-25973 / 0010-25969

CVD Producer Heater Block

料号 0040-85475 等，新型设计预防 arcing 缺陷P/N 0040-85475 etc.; new design prevents arcing defects

查看全部零配件详情 →All Parts Details →

智能消防产品Smart Fire-Safety Products

15 年以上动密封设计生产经验，3C 及防爆认证15+ years of dynamic-sealing design and production, CCC and explosion-proof certified

ZDMP 系列大流量喷淋装置 / ZDMS 系列自动消防水炮ZDMP high-flow sprinkler systems / ZDMS automatic fire monitors
PSKD 系列电控消防水炮 / PLKD 系列电控两用消防水炮PSKD electric fire monitors / PLKD dual-purpose electric fire monitors
ZDMS 自动防爆消防炮 / BU 系列防爆产品 / HS-ZB 系列隔爆电机 / CY 系列车用炮ZDMS explosion-proof monitors / BU explosion-proof products / HS-ZB flameproof motors / CY vehicle-mounted monitors
智慧消防产品持续研发布局Ongoing R&D roadmap for smart fire-safety products

访问消防产品专站 →Visit Fire Products Site →

精密机械代工Precision Machining OEM

日式精加工品控体系，服务国内外知名企业Japanese-style precision QC system serving well-known customers at home and abroad

代工客户包括：OEM customers include:

Honeywell（美国USA）冰山松洋压缩机（大连）Bingshan-Sanyo Compressor (Dalian) 威海广泰空港设备Weihai Guangtai Airport Equipment 营口新山鹰报警设备Yingkou Xinshanying Alarm Equipment 合肥科大利安安全技术Hefei USTC Li'an Safety Technology 营口世纪电子仪器Yingkou Century Electronic Instruments 大连希尔德安全技术Dalian Shield Safety Technology

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